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Remote infrared radiation detection using piezoresistive microcantilevers

 

作者: P. G. Datskos,   P. I. Oden,   T. Thundat,   E. A. Wachter,   R. J. Warmack,   S. R. Hunter,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 69, issue 20  

页码: 2986-2988

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.117752

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (<ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. ©1996 American Institute of Physics.

 

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