Remote infrared radiation detection using piezoresistive microcantilevers
作者:
P. G. Datskos,
P. I. Oden,
T. Thundat,
E. A. Wachter,
R. J. Warmack,
S. R. Hunter,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 20
页码: 2986-2988
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117752
出版商: AIP
数据来源: AIP
摘要:
A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (<ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. ©1996 American Institute of Physics.
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