The electron backscattering coefficient and reflected energy for surface films on bulk substrates have been computed using the photon‐electron Monte Carlo transport codesandyl. The calculations were done for the film/substrate configurations Al/Pt, Ag/Pt, Ag/Al, and Au/Al with incident electron beam energies of 20, 40, 60, and 100 keV at different angles of incidence and various film thicknesses. The backscattering results are compared with available experimental data taken at normal incidence.