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Photoreflectance measurements of indium content in indium‐alloyed semi‐insulating GaAs substrates

 

作者: P. W. Yu,   S. Ravipati,   B. E. Taylor,   W. C. Mitchel,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 3  

页码: 1471-1474

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.345653

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Room‐temperature photoreflectance measurements were used to determine the radial and axial distribution of low levels of indium in 3‐in.‐diameter semi‐insulating bulk GaAs materials grown by the liquid‐encapsulated Czochralski method. These results were compared with 4.2‐K photoluminescence data and found to be accurate and more convenient for this application. Room‐temperature photoreflectance allows an accurate determination of the indium content in the range of mole fraction 0.1%–2.0% with standard deviation of 0.03%. Two types of radial inhomogeneity were found in commercially available GaAs wafers. This is discussed in terms of indium segregation and shape of solid and liquid interface during the crystal growth.

 

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