Integrated SAW-AO optical switch on Si
作者:
Tadashi Shiosaki,
Naoki Kitamura,
Akira Kawabata,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 2,
issue 1-4
页码: 197-205
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215743
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The developments in the integration of the SAW acousto-optic Bragg deflector of guided optical waves in the ZnO thin film on a Si substrate and Schottky diode photodetectors on the same Si substrate are reported. Thin film lens has been fabricated by making use of a gradual film thickness change, the refractive index dispersion of the fundamental mode on the film thickness, and the mode cut-off property of the higher order modes in the area of the concave shaped converging lens of the ZnO film. The guided optical waves SAW-Bragg deflected, mode selected and lens focused are detected by the Schottky diode photo-detector incorporated at the boundary between the ZnO film wave guide and the Si substrate. A couple of detectors are located one for deflected and the other for undeflected waves.
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