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Photodesorption and adsorbate–surface interactions stimulated by laser radiation

 

作者: T. J. Chuang,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1985)
卷期: Volume 3, issue 5  

页码: 1408-1420

 

ISSN:0734-211X

 

年代: 1985

 

DOI:10.1116/1.583001

 

出版商: American Vacuum Society

 

关键词: SURFACE REACTIONS;ADSORPTION;DESORPTION;LASER RADIATION;PHOTOCHEMISTRY;REVIEWS;METALS;COPPER;SILVER;SILICON;PHOTON COLLISIONS;Cu;Ag;Si

 

数据来源: AIP

 

摘要:

Laser photons can interact with a gas‐solid system to promote heterogeneous reactions and to stimulate desorption. In this paper, a review is given on desorption processes induced by photon radiation. This includes laser‐induced thermal desorption and photodesorption by ultraviolet, visible, and infrared lasers. Relevant theories and recent experimental results are discussed with particular emphases on surface molecular dynamics and on assessing the quantum and the thermally assisted radiation effects.

 

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