Photodesorption and adsorbate–surface interactions stimulated by laser radiation
作者:
T. J. Chuang,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1985)
卷期:
Volume 3,
issue 5
页码: 1408-1420
ISSN:0734-211X
年代: 1985
DOI:10.1116/1.583001
出版商: American Vacuum Society
关键词: SURFACE REACTIONS;ADSORPTION;DESORPTION;LASER RADIATION;PHOTOCHEMISTRY;REVIEWS;METALS;COPPER;SILVER;SILICON;PHOTON COLLISIONS;Cu;Ag;Si
数据来源: AIP
摘要:
Laser photons can interact with a gas‐solid system to promote heterogeneous reactions and to stimulate desorption. In this paper, a review is given on desorption processes induced by photon radiation. This includes laser‐induced thermal desorption and photodesorption by ultraviolet, visible, and infrared lasers. Relevant theories and recent experimental results are discussed with particular emphases on surface molecular dynamics and on assessing the quantum and the thermally assisted radiation effects.
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