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A novel design of piezo-driven dual-dimension optical scanning mechanism

 

作者: S. H. Chang,   Y. C. Tung,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1998)
卷期: Volume 69, issue 9  

页码: 3277-3282

 

ISSN:0034-6748

 

年代: 1998

 

DOI:10.1063/1.1149092

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An optical scanning mechanism capable of dual-dimension scanning is presented. The mechanism uses a piezoelectric element to drive a V-shaped reflecting mirror surface through two pairs of elastic beams. The design entails the use of various vibration modes to reflect the incident light in orthogonal directions. The design, fabrication, and mechanical, electrical, and optical performance of this scanning mechanism are presented. The scanning sensitivities of 88.8 and 19.3 &mgr;rad/V in each scanning direction are measured when operated at frequencies of 23.8 and 48.8 kHz, respectively. The capability of fine scanning sensitivity, high operating frequency, and wide scanning range is applicable for fine adjustment of the laser beam. ©1998 American Institute of Physics.

 

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