Intramolecular rearrangement processes in the mass spectra of trimethylsilyl derivatives of hydroxy steroids are discussed in terms of the reaction of a siliconium center and a heteroatom. The reaction is shown to be stereospecific. The reactivity of siliconium cations also results in the occurrence of intermolecular reactions under electron impact ionization conditions. Tetramethylsilane is used as a precursor for the production of siliconium ions and examples of chemical ionization mass spectra employing this reagent are shown.