Projection printing of gold micropatterns by photochemical decomposition
作者:
Thomas H. Baum,
Ernesto E. Marinero,
Carol R. Jones,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 18
页码: 1213-1215
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97418
出版商: AIP
数据来源: AIP
摘要:
Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 &mgr;m were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single‐step, dry process for selectively producing metal patterns is highlighted.
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