Electrical properties of modulation‐doped HgTe–CdTe superlattices
作者:
S. Hwang,
Y. Lansari,
Z. Yang,
J. W. Cook,
J. F. Schetzina,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 1799-1804
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585802
出版商: American Vacuum Society
关键词: HgTe:(In;As);(Hgcd)Te:(In:As)
数据来源: AIP
摘要:
Growth of modulation‐doped HgTe–CdTe superlattices (SLs) at very low temperatures (140 °C) by photoassisted molecular beam epitaxy is reported. SL layer thicknesses were intentionally chosen such that most of the SLs studied are inverted‐band semimetals or inverted‐band semiconductors. Bothp‐ andn‐type samples were successfully prepared and studied. The doped superlattices exhibit excellent electrical properties. Lack of carrier freeze‐out at low temperatures provides convincing evidence that modulation‐doping has been achieved.
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