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Electrical conductivity of Al‐implanted films of ZnS

 

作者: C. B. Thomas,   H. S. Reehal,   A. J. Warren,   J. M. Gallego,  

 

期刊: Applied Physics Letters  (AIP Available online 1981)
卷期: Volume 38, issue 10  

页码: 736-738

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92170

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Films of ZnS have been deposited by rf sputtering and subsequently implanted with Al. Examination of the conductivities, after annealing, shows that Al is effective in decreasing the film resistivity. At ∼ 300 K the room‐temperature conductivity could be reduced to 10−2&OHgr;−1 cm−1compared with 10−10&OHgr;−1 cm−1in undoped films. The small activation energy of ∼ 0.1 eV of the electrical conductivity and the temperature dependence of the thermoelectric power may possibly be indicative of impurity conduction.

 

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