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Effect of alloying platinum bottom electrode with silver: In relation to CSD processing of PZT thin films

 

作者: Rab Wilson,   Zhaorong Huang,   Qi Zhang,   RogerW. Whatmore,   Peiyi Wang,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 2000)
卷期: Volume 29, issue 3-4  

页码: 251-271

 

ISSN:1058-4587

 

年代: 2000

 

DOI:10.1080/10584580008222243

 

出版商: Taylor & Francis Group

 

关键词: Keywords: alloying; CSD; intermetallic; hillocks; planarisation; crystallisation

 

数据来源: Taylor

 

摘要:

A quantity of silver was evaporated onto platinised-silicon (Pt/Ti/SiO2/Si) and then annealed in air to form a silver-platinum alloy. The lattice spacing of the alloy matched that of the composition of lead zirconate titanate (PZT) used. The surface of the silver-platinum alloy was covered in hillocks. It was found that after PZT was deposited by chemical solution deposition (CSD) these hillocks had disappeared. The presence of mobile Pb and the formation of a transient intermetallic phase (Pt3Pb) was taken as the cause for this planarisation. Nucleation of perovskite PZT occurred earlier on silver-platinum compared to a film deposited onto platinised-silicon. The degree of preferred orientation developed for the film on the alloyed electrode was not as good as that found on platinised-silicon.

 

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