Highly textured single phase superconducting YBa2Cu3O7−xfilms have been successfully grown on the yttria‐stabilized zirconia (100) substrates by using the metalorganic chemical vapor deposition technique. The as‐deposited films grown at 650 °C were homogeneous mixtures of the related metal oxides and carbonates. Subsequent thermal annealing under oxygen flow yielded single phase superconducting films whose thickness corresponded to the deposition rates of approximately 10 &mgr;m/h. After the post‐annealing the films deposited on the yttria‐stabilized zirconia substrates exhibited a highly textured x‐ray pattern withcaxis perpendicular to the substrate surface. These films show an onset superconducting transition temperature of 93 K with the resistance becoming zero at 84 K.