We carried out STM/STS studies of Ag structures grown on Bi2Te3surface at different temperatures. This kind of investigation had not been attempted by others. We got images of surface of the substrate in many scales from micrometers to nanometers, which showed a layered structure of Bi2Te3, with many monoatomic terraces. We found agreement between measured heights and corresponding bulk crystal structure derived from X‐ray data. Using STS we carried out examination of the electronic structure of the substrate and created nanostructures. We observed different I‐V characteristics and contrast on CITS maps on non‐equivalent terraces of Bi2Te3as well as between Ag structures and the substrate. The dI/dV (∼DOS) curves referring to different terraces of the substrate were compared with theoretically calculated by Larson et al. DOS of Bi p and Te‐1 p orbitals. The analysis of our results allowed us to distinguish bismuth and tellurium planes. The diameters and densities of Ag clusters deposited on the Bi2Te3substrate were dependent on the substrate temperature. The diameter was increasing with temperature, contrary to the clusters’ density (number of clusters per unit of area). © 2003 American Institute of Physics