首页   按字顺浏览 期刊浏览 卷期浏览 Secondary Electron Detection in a Field Emission Scanning Microscope
Secondary Electron Detection in a Field Emission Scanning Microscope

 

作者: A. V. Crewe,   M. Isaacson,   D. Johnson,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1970)
卷期: Volume 41, issue 1  

页码: 20-24

 

ISSN:0034-6748

 

年代: 1970

 

DOI:10.1063/1.1684266

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Operation of a field emission scanning microscope in a secondary electron mode is described. The microscope uses only a field emission electron gun without auxiliary lenses and a silicon surface barrier detector to detect the secondary electron current. Resolution of 100 to 200 Å with beam currents of 10−11to 10−10A is reported. Micrographs of a variety of specimens are shown.

 

点击下载:  PDF (544KB)



返 回