Secondary Electron Detection in a Field Emission Scanning Microscope
作者:
A. V. Crewe,
M. Isaacson,
D. Johnson,
期刊:
Review of Scientific Instruments
(AIP Available online 1970)
卷期:
Volume 41,
issue 1
页码: 20-24
ISSN:0034-6748
年代: 1970
DOI:10.1063/1.1684266
出版商: AIP
数据来源: AIP
摘要:
Operation of a field emission scanning microscope in a secondary electron mode is described. The microscope uses only a field emission electron gun without auxiliary lenses and a silicon surface barrier detector to detect the secondary electron current. Resolution of 100 to 200 Å with beam currents of 10−11to 10−10A is reported. Micrographs of a variety of specimens are shown.
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