Subnanometer behavior of a capacitive feedback, piezoelectric displacement actuator
作者:
S. Harb,
S. T. Smith,
D. G. Chetwynd,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 2
页码: 1680-1689
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143323
出版商: AIP
数据来源: AIP
摘要:
This paper presents the calibration of piezoelectrically actuated capacitance micrometers for use as a transfer standard of nanometer level precision using x‐ray interferometry. Because of the interferometer’s extreme sensitivity to twisting moments, there is a pressing need for high‐quality transfer systems to widen its range of applicability. Two promising candidates for this are piezoelectric actuators controlled by internal capacitive sensors and parallel‐plate capacitive micrometry. Both are investigated to determine useful precision for the discrimination and traceability over the range 1–20 nm. It is shown that systems of high mechanical stability can readily be produced. They offer at the very worst traceable accuracy of a few tenths of a nanometer, with, in the case of the gauge, a wide bandwidth of greater than 1 kHz. It is argued that existing technologies can provide calibrators working at relatively rapid speeds with uncertainties better than around 20 pm over usefully large ranges, presently 15 &mgr;m.
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