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Anisotropic optical reflection by stepped surfaces

 

作者: P. L. de Boeij,   C. M. J. Wijers,   E. Zoethout,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1996）
卷期: Volume 14, issue 4  

页码: 3080-3088

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.589068

 

出版商: American Vacuum Society

 

关键词: SILICON;POLARIZABILITY;OPTICAL PROPERTIES;ANISOTROPY;Si

 

数据来源: AIP

 

摘要:

Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped Si(001̄) 2×1‐type surfaces. OnlyDB‐type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset.

 

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