Magnesium‐ and calcium‐doping behavior in molecular‐beam epitaxial III‐V compounds
作者:
C. E. C. Wood,
D. Desimone,
K. Singer,
G. W. Wicks,
期刊:
Journal of Applied Physics
(AIP Available online 1982)
卷期:
Volume 53,
issue 6
页码: 4230-4235
ISSN:0021-8979
年代: 1982
DOI:10.1063/1.331248
出版商: AIP
数据来源: AIP
摘要:
Residence lifetimes of Mg on GaAs surfaces were observed using 10 KV reflection electron diffraction and Auger electron spectroscopy to decrease from ∼120 s at 550 °C to ∼1 s at 600 °C. The electrical incorporation coefficient is ∼0.3 at and below 500 °C decreasing to ∼3×10−4at 600 °C at the expense of desorption. Hole mobilities of uniformly Mg‐doped samples are as good as those for equivalently Be‐doped GaAs samples. Calcium does not behave as a shallow acceptor in GaAs grown by molecular‐beam epitaxy.
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