首页   按字顺浏览 期刊浏览 卷期浏览 Utilization of Rutherford backscatter spectroscopy for the determination of thin&hyphen...
Utilization of Rutherford backscatter spectroscopy for the determination of thin‐film densities

 

作者: D. G. Simons,   C. R. Crowe,   M. D. Brown,  

 

期刊: Journal of Applied Physics  （AIP Available online 1982）
卷期: Volume 53, issue 5  

页码: 3900-3902

 

ISSN:0021-8979

 

年代: 1982

 

DOI:10.1063/1.331095

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A method to determine densities of thin surface films by measuring areal densities using Rutherford backscatter spectroscopy coupled with linear film‐thickness measurements is described. This technique can be nondestructive and has an accuracy of 10 to 15%. Sample measurements on various thin films are given to demonstrate the use of this procedure.

 

点击下载:  PDF (167KB)



返 回