首页   按字顺浏览 期刊浏览 卷期浏览 Baffle‐free refractory dimer arsenic source for molecular‐beam epitaxy
Baffle‐free refractory dimer arsenic source for molecular‐beam epitaxy

 

作者: T. J. Mattord,   V. P. Kesan,   G. E. Crook,   T. R. Block,   A. C. Campbell,   D. P. Neikirk,   B. G. Streetman,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1988)
卷期: Volume 6, issue 6  

页码: 1667-1670

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584427

 

出版商: American Vacuum Society

 

关键词: MOLECULAR BEAM EPITAXY;EFFICIENCY;HETEROSTRUCTURES;CRACKING;DESIGN;MOLYBDENUM;ELECTRICAL PROPERTIES;OPTICAL PROPERTIES;TANTALUM;GALLIUM ARSENIDES;ALUMINIUM ARSENIDES;PHOSPHORUS;OPTICAL PROPERTIES;OPTIMIZATION;GaAs

 

数据来源: AIP

 

摘要:

A refractory, two‐zone, large‐capacity, baffle‐free arsenic cracking source for molecular‐beam epitaxy is presented. The new features of this design include the use of a molybdenum tube to provide efficient cracking, a horizontal sublimator at a right‐angle geometry to the cracking section, a baffle‐free design, and the use of expanded tantalum heating filaments. High‐efficiency cracking is obtained at cracking tube temperatures between 750 and 1050 °C. Bulk GaAs and GaAs/AlGaAs heterostructures grown using this source exhibit good electrical and optical properties, with clear improvements in electrical behavior when compared to an As4source. We believe this source design can be easily applied to other column V materials such as phosphorus and antimony.

 

点击下载:  PDF (400KB)



返 回