Fabrication and microwave measurement of a space harmonic monolithic structure
作者:
Clifford M. Krowne,
Daniel McCarthy,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 9
页码: 525-527
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98147
出版商: AIP
数据来源: AIP
摘要:
Theory, engineering design, fabrication, and experimental test of the first completely monolithic grating amplifier realized in silicon are described. Experimental results are presented for frequencies between 0.1 and 2.0 GHz at 300 K for the device, referred to as the solid state space harmonic amplifier structure. Electronic gain is about 1.5 dB/mm with a cold circuit loss of 4.6 dB/mm for the 200‐&mgr;m‐long interaction region device.
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