Planar electrostatic micromotors on the basis of the ferroelectric films
作者:
V.L. Dyatlov,
E.G. Kostsov,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 23,
issue 1-4
页码: 149-160
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908210146
出版商: Taylor & Francis Group
关键词: Ferroelectric films;micromotor;electrostatics
数据来源: Taylor
摘要:
The principle of the operation of the step petalous micromotors based on the effect of the electrostatic rolling on the ferroelectric surface is considered. These micromotors produced by means of microelectronic technology are distinguished as being energy-intensive (more than 1 J/m2at 20–40 V voltage) and they provide precise movement: the step ranges from 10 Å to 100 μm. The technical and experimental data are given characterizing the energetic and mechanical parameters of these micromotors.
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