Synthesis of Pd–Te intermetallic compound films on 2H–MoS2(0001) by molecular beam epitaxy
作者:
Masanori Yata,
Keikichi Nakamura,
Keiichi Ogawa,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 3019-3024
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577166
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;INTERMETALLIC COMPOUNDS;PALLADIUM ALLOYS;TELLURIUM ALLOYS;ADHESION;MOLYBDENUM SULFIDES;TEMPERATURE EFFECTS;HIGH TEMPERATURE;FILMS;Pd–Te
数据来源: AIP
摘要:
A successful attempt to grow the Pd–Te intermetallic compounds on 2H–MoS2(0001) surfaces by molecular beam epitaxy will be reported. When a Te2molecular beam alone impinges onto the 2H–MoS2(0001) substrate, the sticking coefficient is found to decrease with increasing substrate temperature (Ts) and to become zero atTs≥470 K. The sticking coefficient of the Te2molecules impinging simultaneously with a Pd beam, however, is finite even at temperatures above 470 K. Under the simultaneous impinging condition, three kinds of intermetallic compounds: PdTe2(001), PdTe(001), Pd9Te4(010) are found to grow heteroepitaxially. The phase formed in the film depends on the flux ratio and the substrate temperature. The resultant phase diagram is explained quantitatively by considering a capture rate of Te molecules by the arriving Pd atoms.
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