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The electrical properties of stacking faults and precipitates in heat‐treated dislocation‐free Czochralski silicon

 

作者: L. C. Kimerling,   H. J. Leamy,   J. R. Patel,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 30, issue 5  

页码: 217-219

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89355

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have studied the electrical properties of dislocations, stacking faults, and precipitates produced during 1200 °C aging of crucible‐grown silicon. The defects were examined by SEM in the charge collection mode, at temperatures from 77 to 300 °K. Undecorated Frank extrinsic stacking faults exhibit defect energy levels in the upper half of the gap (∼Ec−0.1 eV). The partial dislocations bounding these faults possess energy levels lower thanEc−0.3 eV. Finally, precipitates are observed to act as microplasma sites at low (T<300 °K) temperatures.

 

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