Chemical basis for InP‐metal Schottky‐barrier formation
作者:
L. J. Brillson,
C. F. Brucker,
A. D. Katnani,
N. G. Stoffel,
G. Margaritondo,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 38,
issue 10
页码: 784-786
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92162
出版商: AIP
数据来源: AIP
摘要:
Soft‐x‐ray photoemission measurements of ultrahigh vacuum‐cleaved InP‐metal interfaces reveal two classes of microscopic chemical structure. Reactive metal (Al,Ni)‐InP interfaces display cation‐rich outdiffusion, atomically abrupt microstructure, and low Schottky‐barrier height (&fgr;SB), while unreactive metal (Au, Cu)‐InP interfaces exhibit anion‐rich outdiffusion, diffuse microstructure, and high &fgr;SB. For InP and other III‐V compound semiconductor‐metal junctions, chemical bond strength dominates local atomic structure and the type of electrically‐active sites produced near the interface. These features can be controlled extrinsically by Al or Ni interlayers.
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