首页   按字顺浏览 期刊浏览 卷期浏览 Study of GaSb(001) substrate chemical etching for molecular‐beam epitaxy
Study of GaSb(001) substrate chemical etching for molecular‐beam epitaxy

 

作者: F. W. O. Da Silva,   M. Silga,   C. Raisin,   L. Lassabatere,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1990)
卷期: Volume 8, issue 1  

页码: 75-78

 

ISSN:0734-211X

 

年代: 1990

 

DOI:10.1116/1.584831

 

出版商: American Vacuum Society

 

关键词: SURFACE PROPERTIES;GALLIUM ANTIMONIDES;SUBSTRATES;ETCHING;AUGER ELECTRON SPECTROSCOPY;RHEED;MOLECULAR BEAM EPITAXY;STOICHIOMETRY;SURFACE CLEANING;SCANNING ELECTRON MICROSCOPY;ANNEALING;HIGH TEMPERATURE;GaSb

 

数据来源: AIP

 

摘要:

In this paper we present and discuss the surface properties of GaSb substrates correlated to the cleaning procedure. Different etchants were tested and the resulting surfaces were studied by Auger spectroscopy, then by reflection high‐energy electron diffraction and finally annealed under an Sb4flux in order to get a suitable substrate for molecular‐beam epitaxy. From the comparison of the surface properties we show that one of the tested etchants, which associates HCl, HBr, CH3COOH, and HNO3gives the best results: the etch rate can easily be controlled, the cleaned surfaces are smooth (i.e., free of etch pits) and the surface stoichiometry is the least disturbed by the cleaning procedure.

 

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