Two‐dimensional electron gas in In0.53Ga0.47As/InP heterojunctions grown by atmospheric pressure metalorganic chemical‐vapor deposition
作者:
L. D. Zhu,
P. E. Sulewski,
K. T. Chan,
K. Muro,
J. M. Ballantyne,
A. J. Sievers,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 58,
issue 8
页码: 3145-3149
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.335818
出版商: AIP
数据来源: AIP
摘要:
High‐quality modulation doped In0.53Ga0.47As/InP heterostructures have been grown by atmospheric pressure metalorganic chemical‐vapor deposition (MOCVD) using solid trimethylindium source. The two‐dimensional nature of electrons bound in the In0.53Ga0.47As/InP heterojunctions is proved by a Shubnikov‐de Haas effect experiment. Electron Hall mobilities as high as 12000, 83000, 98000, and 92000 cm2/V s at 300, 77, 40, and 4.2 K are obtained, respectively. The electron effective mass is measured to bem@B|CR=0.043m0by cyclotron resonance experiments on the samples with two‐dimensional electron sheet concentrations of (3.0–3.7)×1011/cm2. From far‐infrared impurity absorption data the ionization energy of the residual donors in the MOCVD‐grown In0.53Ga0.47As is determined to be 2.95 meV.
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