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The spatial distribution of ions implanted into solids subject to diffusion and surface sputtering

 

作者: R. Collins,   G. Carter,  

 

期刊: Radiation Effects  (Taylor Available online 1975)
卷期: Volume 26, issue 3  

页码: 181-191

 

ISSN:0033-7579

 

年代: 1975

 

DOI:10.1080/00337577508234749

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The depth distributions of ions implanted into solids is evaluated : heoretically for the situation where, following implantation and degradation to rest, each ion can diffuse in the solid whilst simultaneously the surface of the solid is eroded via the sputtering process. Time dependent and equilibrium solutions of the depth distribution or concentration profiles and the total quantities of trapped atoms are determined for cases where (a) the surface is a perfectly transparent boundary for diffusing ions, allowing immediate escape by diffusion only, and (b) the escape of diffusing ions takes place by surface erosion only, the diffusion rate becoming zero at the surface. Two methods of approach for situation (a) are examined-the Laplace transformation technique of the defining partial differential equation and a novel image method. Solutions are compared with earlier work and shown to correspond where appropriate.

 

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