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Compact repetitively pulsed excimer laser

 

作者: D. B. Cohn,   E. E. Conley,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1983)
卷期: Volume 54, issue 2  

页码: 250-251

 

ISSN:0034-6748

 

年代: 1983

 

DOI:10.1063/1.1137355

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An excimer laser is described with a gain volume of 20 cm3and capable of repetition rates on the order of 10 Hz using a simple pulse‐charge circuit and gas flow loop. With gas mixtures typical of the XeCl species, maximum single‐pulse output energies of 15 mJ are obtained at charge voltages of 30 kV and run times are on the order of hours for a single gas fill.

 

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