Compact repetitively pulsed excimer laser
作者:
D. B. Cohn,
E. E. Conley,
期刊:
Review of Scientific Instruments
(AIP Available online 1983)
卷期:
Volume 54,
issue 2
页码: 250-251
ISSN:0034-6748
年代: 1983
DOI:10.1063/1.1137355
出版商: AIP
数据来源: AIP
摘要:
An excimer laser is described with a gain volume of 20 cm3and capable of repetition rates on the order of 10 Hz using a simple pulse‐charge circuit and gas flow loop. With gas mixtures typical of the XeCl species, maximum single‐pulse output energies of 15 mJ are obtained at charge voltages of 30 kV and run times are on the order of hours for a single gas fill.
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