首页   按字顺浏览 期刊浏览 卷期浏览 Molecular velocity distribution at large Knudsen numbers
Molecular velocity distribution at large Knudsen numbers

 

作者: W. Jitschin,   G. Reich,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1991)
卷期: Volume 9, issue 5  

页码: 2752-2756

 

ISSN:0734-2101

 

年代: 1991

 

DOI:10.1116/1.577194

 

出版商: American Vacuum Society

 

关键词: KNUDSEN FLOW;VELOCITY DISTRIBUTION;BOLTZMANN STATISTICS;PRESSURE MEASUREMENT;CALIBRATION;VACUUM SYSTEMS

 

数据来源: AIP

 

摘要:

It is commonly assumed that the distribution of molecular velocities follows a Maxwellian distribution also in the range of high and ultrahigh vacuum, i.e., at large Knudsen numbers. This distribution is theoretically derived from statistical analysis of an ensemble of molecules with frequent molecule–molecule collisions. Such a situation prevails at higher pressures, i.e., at small Knudsen numbers. However, at smaller pressures the molecule–wall collisions prevail, and due to the different nature of these collisions, the statistical arguments fail. As a consequence, the molecular velocity distribution cannot be predictedapriori at such pressures. In the present paper the applicability of the Maxwellian distribution in vacuum metrology at large Knudsen numbers, i.e., in the molecular regime is investigated. For this purpose, the pressures generated in primary standards of the static and dynamic expansion type are calculated for an arbitrary velocity distribution after expansion. The pressure generated by static expansion is proportional to the expectation value 〈v2z〉, that generated by dynamic expansion proportional to the ratio of expectation values 〈v2z〉/〈‖vz‖〉 (vzdenotes the one‐dimensional velocity component). Available experimental calibration data obtained by static and dynamic expansion of common gases are compared to each other and with direct pressure measurements with a liquid column manometer. These data provide a decisive test for the expectation values 〈v2z〉 and 〈‖vz‖〉 in the molecular range. Excellent agreement within the uncertainty of less than 1% between experimental values and values calculated assuming a Maxwellian distribution is found. Thus one may conclude that in common vacuum metrology the Maxwellian distribution can be applied for deriving pressures also in the molecular regime with high accuracy.

 

点击下载:  PDF (382KB)



返 回