Spreading functions in secondary‐electron analysis
作者:
C. A. Slocomb,
W. P. Ellis,
期刊:
Journal of Applied Physics
(AIP Available online 1974)
卷期:
Volume 45,
issue 8
页码: 3332-3336
ISSN:0021-8979
年代: 1974
DOI:10.1063/1.1663781
出版商: AIP
数据来源: AIP
摘要:
At low primary‐electron beam energies, Auger and loss transitions frequently interfere. The distinction between the two types can be accomplished easily by modulating the crystal. Auger peaks, which shift with crystal bias, are spread in energy and thus are effectively removed from the spectra whereas the loss peaks are relatively unaffected. The spreading functions are treated mathematically, and computer‐generated results agree with experimental data.
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