Incorporation of boron during thermal chemical vapor deposition of doped hydrogenated amorphous silicon
作者:
Howard M. Branz,
John H. Flint,
Christopher J. Harris,
John S. Haggerty,
David Adler,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 12
页码: 922-924
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98802
出版商: AIP
数据来源: AIP
摘要:
We report investigations of B incorporation during the growth of B‐doped hydrogenated amorphous silicon (a‐Si:H) thin films by laser‐induced chemical vapor deposition (CVD) from mixtures of SiH4and B2H6. Because B2H6decomposition is very rapid, nearly all the B admitted into the reaction cell is incorporated in the growing film and the B concentration in the solid is B2H6flow rate limited rather than controlled by the gas phase dopant concentration. Widely varying B‐incorporation efficiencies reported for B‐dopeda‐Si:H grown by a variety of thermal CVD techniques are summarized and explained.
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