Mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices measured by nanoindentation
作者:
Kevin M. Hubbard,
Thomas R. Jervis,
Paul B. Mirkarimi,
Scott A. Barnett,
期刊:
Journal of Applied Physics
(AIP Available online 1992)
卷期:
Volume 72,
issue 9
页码: 4466-4468
ISSN:0021-8979
年代: 1992
DOI:10.1063/1.352177
出版商: AIP
数据来源: AIP
摘要:
We have used nanoindentation to measure the mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices, grown on MgO(100), as a function of the wavelength &lgr;. The V/Nb ratio within the VNbN layers was chosen to provide a lattice match with TiN, minimizing effects resulting from coherency strains. For &lgr;≥4 nm, the hardness was found to be significantly enhanced relative to a homogeneous reference film of the same average composition. For &lgr;<4 nm, the hardness decreased to a value close to that of the reference film. The elastic modulus was found to be constant for &lgr;≥4nm, at a value close to that predicted by the law of mixtures. For samples with &lgr;=2.3 and 2.8 nm, there was a 15% decrease in modulus. The observed variations appear not to be an effect of interfacial strain. Possible mechanisms are discussed.
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