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Sputtering and Secondary Electron Emission of Metals Bombarded by Argon Ions

 

作者: Gregory Timoshenko,  

 

期刊: Journal of Applied Physics  (AIP Available online 1941)
卷期: Volume 12, issue 1  

页码: 69-77

 

ISSN:0021-8979

 

年代: 1941

 

DOI:10.1063/1.1712854

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A method has been devised for accurate determination of the absolute rate of sputtering, i.e., the measurement of the number of atoms liberated from a metallic target under the impact of a single ion of known energy. The accuracy of this measurement was 6 to 7 percent—a precision hereto unattainable by other methods. The apparatus producing argon ions consisted of a strong ion‐source of capillary‐arc type. The ions were accelerated within a high vacuum chamber through a potential, which was varied from 2000 to 7000 volts, and then allowed to strike a metallic target. The sputtering rate was determined by measuring the positive ion current to the target and the loss of target material. Results are given on sputtering of silver by argon, and on the secondary electron emission from aluminum and molybdenum.

 

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