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Parametric study of a radio‐frequency glow discharge using a continuum model

 

作者: Sang‐Kyu Park,   Demetre J. Economou,  

 

期刊: Journal of Applied Physics  （AIP Available online 1990）
卷期: Volume 68, issue 9  

页码: 4888-4890

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.346122

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An efficient numerical algorithm was developed to solve the continuity equations describing charged particle transport and potential distribution in a low‐pressure glow discharge in an argonlike gas. A parametric investigation of the effect of gas pressure and electrode spacing on the discharge properties was conducted.

 

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