Homo‐ and heteroepitaxial growth of high quality ZnSe by molecular beam epitaxy
作者:
R. M. Park,
H. A. Mar,
N. M. Salansky,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1985)
卷期:
Volume 3,
issue 6
页码: 1637-1640
ISSN:0734-211X
年代: 1985
DOI:10.1116/1.582953
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;SURFACE STRUCTURE;ZINC SELENIDES;VAPOR DEPOSITED COATINGS;SPUTTERING;ANNEALING;RHEED;EXCITONS;PHOTOLUMINESCENCE;TWINNING;ARGON IONS;LAYERS;ZnSe
数据来源: AIP
摘要:
ZnSe layers (1–2 μm thick) have been grown by molecular beam epitaxy on both (111) and (100) oriented ZnSe substrates. The layers were grown on atomically clean, single‐crystalline ZnSe surfaces preparedinsituby an Argon‐ion sputtering/annealing process. Homoepitaxial ZnSe layers grown on (111) ZnSe exhibited microtwinning as indicated by reflection high energy electron diffraction (RHEED) observations together with zero detectable excitonic photoluminescence emission. In contrast, layers grown on (100) ZnSe had smooth surfaces, indicated by a streaky RHEED pattern, and exhibited strong 4.2 K excitonic emission at 2.7980 eV (I0α). This can be contrasted with the Ga‐bound excitonic emission at 2.7972 eV (IGa20) observed from layers grown on (100) GaAs substrates.
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