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Automatic Optical Thickness Gauge for Thin Film Measurements

 

作者: Thomas P. Murray,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1962）
卷期: Volume 33, issue 2  

页码: 172-176

 

ISSN:0034-6748

 

年代: 1962

 

DOI:10.1063/1.1746529

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An automatic ellipsometer for measurement of the thickness of thin films in the monomolecular range is described. The instrument is capable of pushbutton operation by untrained personnel, and has been in use in an industrial laboratory for about two years.

 

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