Miniature, high-resolution, quadrupole mass-spectrometer array
作者:
O. J. Orient,
A. Chutjian,
V. Garkanian,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 3
页码: 1393-1397
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1147947
出版商: AIP
数据来源: AIP
摘要:
A miniature quadrupole mass spectrometer array consisting of 16 rods in a 4×4 array is reported. Each rod is 25 mm in length and 2 mm in diameter. The ionizer is of a miniature Nier-type design, and the detector is a channel-type electron multiplier. Operating frequencies are 5.3, 7.1, and 12.9 MHz. The mass range demonstrated herein is 1–300 u; and the resolution of the system is 0.1–0.5 u (full width at half-maximum), orm/&Dgr;m=600. The present sensitivity is calculated and measured to be approximately1×1012counts/Torr s. ©1997 American Institute of Physics.
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