Grain boundary mediated amorphization in silicon during ion irradiation
作者:
Harry A. Atwater,
Walter L. Brown,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 1
页码: 30-32
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102637
出版商: AIP
数据来源: AIP
摘要:
Amorphous Si is nucleated heterogeneously at grain boundaries during irradiation of polycrystalline Si thin films by 1.5 MeV Xe+ions for temperatures of 150–225 °C. Moreover, the heterogeneous nucleation kinetics of amorphous Si are strongly dependent on grain boundary structure. Following formation at grain boundaries, the amorphous Si layer grows at a rate comparable to that previously observed at a pre‐existing planar amorphous‐crystal interface. As amorphization proceeds, a decrease in average grain size and a marked change in the grain size distribution results. We suggest a simple atomistic model for amorphous phase formation in Si in which the nucleation kinetics are dependent on the point defect‐grain boundary interactions.
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