The influence of growth conditions on sulfur and selenium incorporation in Ga1−xAlxAs grown by molecular‐beam epitaxy
作者:
D. A. Andrews,
R. Heckingbottom,
G. J. Davies,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 60,
issue 3
页码: 1009-1014
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.337389
出版商: AIP
数据来源: AIP
摘要:
An electrochemical cell Pt/AgI/Ag2 X/Pt (X=S,Se) has been used as a highly controllable source of chalcogen dimers forn‐type doping of Ga1−xAlxAs grown by molecular‐beam epitaxy (MBE). The incorporation behavior has been investigated as a function of alloy composition, growth temperature, and arsenic overpressure. At low temperatures, <600 °C, sulfur and selenium are incorporated into Ga1−xAlxAs in a facile manner. At higher temperatures, where loss of chalcogen dopant from GaAs has previously been observed, sulfur shows an enhanced stability in the aluminum‐containing alloys. Excess As4is shown to hinder the loss further. The behavior is modelled in terms of the relative stabilities of the volatile and involatile gallium and aluminum chalcogenides under MBE growth conditions.
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