Integration of vertical‐cavity surface‐emitting devices by molecular beam epitaxy regrowth
作者:
Hideaki Saito,
Hideo Kosaka,
Mitsunori Sugimoto,
Ichiro Ogura,
Kenichi Kasahara,
Yoshimasa Sugimoto,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 5
页码: 2905-2909
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587212
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;ALUMINIUM ARSENIDES;GALLIUM ARSENIDES;PHOTOTRANSISTORS;THYRISTORS;WAFERS;OPTOELECTRONIC DEVICES;(Al,Ga)As;GaAs
数据来源: AIP
摘要:
We used two‐step molecular beam epitaxial (MBE) growth to integrate monolithically single and double vertical‐cavity structures on a wafer. This technique is useful for making a single vertical‐cavity surface‐emitting laser–thyristor with a low threshold and a double vertical‐cavity heterojunction phototransistor with both a high responsivity and a large spectral bandwidth. Regrowth on a patterned distributed Bragg reflector after thermal desorption of a passivating GaAs layer resulted in the laser in the single‐cavity section having a threshold current density of 1.0 kA/cm2, which is comparable to that of one grown by conventional one‐step MBE. Controlling thickness to within ±0.3% resulted in the regrown double‐cavity section having a bandwidth of 5 nm.
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