Split‐gate electron waveguide fabrication using multilayer poly(methylmethacrylate)
作者:
M. J. Rooks,
C. C. Eugster,
J. A. del Alamo,
G. L. Snider,
E. L. Hu,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 2856-2860
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585656
出版商: American Vacuum Society
关键词: PMMA;MULTILAYERS;FABRICATION;GATES;GOLD;PALLADIUM;LITHOGRAPHY;ELECTRON BEAMS;MICROELECTRONICS;GALLIUM ARSENIDES
数据来源: AIP
摘要:
We report on techniques for fabricating 20‐nm scale ballistic electron devices and on techniques for imaging and characterizing these patterns in thin layers of poly(methylmethacrylate) (PMMA). A split‐gate fabrication approach with nanometer‐scale Schottky gates is used. Using a multiple layer PMMA resist technique, we have fabricated Au/Pd gates as narrow as 20 nm. In order to enhance the undercut profile a lower molecular weight PMMA is used as the bottom layer. We have also developed a resist stabilization technique which allows the viewing of 20 nm scale features in 0.1‐μm thick PMMA resist under high magnification in a scanning electron microscope. These techniques have been used to fabricate ballistic electron devices which demonstrate quantum interference effects.
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