Limiting conditions of Si selective epitaxial growth in Si2H6gas‐source molecular beam epitaxy
作者:
K. Aketagawa,
T. Tatsumi,
J. Sakai,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 14
页码: 1735-1736
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106234
出版商: AIP
数据来源: AIP
摘要:
The limiting conditions are presented of selective epitaxial growth (SEG) on a SiO2‐patterned Si (001) substrate for Si gas‐source molecular‐beam epitaxy by use of 100% Si2H6. In the initial stage of growth, epitaxial Si was selectively grown on a Si surface in the wide temperature range of 500–850 °C. On the other hand, polycrystalline Si nucleation on a SiO2surface was intimately related to the total volume of supply gas. At a substrate temperature of 700 °C and a Si2H6flow rate of 60 sccm, a SEG layer could be deposited at a rate as high as 645 A˚/min.
点击下载:
PDF
(290KB)
返 回