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Volume expansion of ion‐implanted diamond

 

作者: E. W. Maby,   C. W. Magee,   J. H. Morewood,  

 

期刊: Applied Physics Letters  （AIP Available online 1981）
卷期: Volume 39, issue 2  

页码: 157-158

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92645

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Boron implantation into diamond at room temperature leads to significant irreversible volume expansion when the boron dose exceeds 5×1015cm−2. This observation is presumed to reflect an upper limit in the extent to which diamond can be effectively doped with boron by ion implantation. Similar limitations associated with other implant species are anticipated.

 

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