首页   按字顺浏览 期刊浏览 卷期浏览 Argon metastable densities in radio frequency Ar,Ar/O2andAr/CF4electrical discharges
Argon metastable densities in radio frequency Ar,Ar/O2andAr/CF4electrical discharges

 

作者: Shahid Rauf,   Mark J. Kushner,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 6  

页码: 2805-2813

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366111

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The spatial distributions of excited states in radio frequency electrical gas discharges have been observed to be dynamic functions of gas mixture, pressure, and applied voltage. Recent measurements of two-dimensional profiles of excited states in the Gaseous Electronics Conference reference cell (GECRC) [McMillin and Zachariah, J. Appl. Phys.77, 5538 (1995);79, 77 (1996)] have shown that the spatial distribution of theAr(4s)density varies considerably with operating conditions. The peak density ofAr(4s)systematically shifted in position, as well as changed in magnitude, with variations in pressure, applied voltage, and gas mixture. In this article, we present results from a two-dimensional computer simulation of Ar,Ar/O2,andAr/CF4discharges sustained in the GECRC with the intent of investigating the experimental trends. The simulations, performed with the Hybrid Plasma Equipment Model, agree well with experiments. They show that the shift inAr(4s)densities is largely explained by the reduction in the electron mean free path, and local perturbations in the ambipolar electric field resulting from electrode structures. Additions of small amounts ofO2andCF4decrease theAr(4s)density due to quenching, and change its profile due to a transition to an electronegative plasma. ©1997 American Institute of Physics.

 

点击下载:  PDF (207KB)



返 回