Charge transfer cross section of He+in collisional helium plasma using the plasma immersion ion implantation technique
作者:
Shu Qin,
Chung Chan,
Jim Browning,
Steve Meassick,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 3
页码: 1548-1552
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354855
出版商: AIP
数据来源: AIP
摘要:
The charge transfer collision cross section of He+ions in a collisional helium plasma has been determined based on the ion energy distribution at the target during the plasma immersion ion implantation (PIII) process. The ion energy distribution is obtained by inferring data from a secondary‐ion mass spectroscopy measurement and a simple collisional theory. The value of the charge transfer cross section in the collisional plasma was found to be higher than previously published values. The cross‐section value determined by the PIII technique was used in a plasma simulation and was found to agree with our experimental observations.
点击下载:
PDF
(544KB)
返 回