首页   按字顺浏览 期刊浏览 卷期浏览 Dependence of thin‐film microstructure on deposition rate by means of a computer...
Dependence of thin‐film microstructure on deposition rate by means of a computer simulation

 

作者: Karl‐Heinz Mu¨ller,  

 

期刊: Journal of Applied Physics  (AIP Available online 1985)
卷期: Volume 58, issue 7  

页码: 2573-2576

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.335885

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A computer simulation is employed to demonstrate, in a two‐dimensional growth model, that a vapor‐deposited thin film of low adatom mobility undergoes a sudden change from a porous columnar microstructure to a densely packed film if the substrate temperature is increased to a certain value. The temperature where this structural transition occurs is shown to be related to the lower boundary temperature of the empirical structure‐zone model. The dependence of the transition temperature and range on the vapor deposition rate is discussed.

 

点击下载:  PDF (280KB)



返 回