Dependence of thin‐film microstructure on deposition rate by means of a computer simulation
作者:
Karl‐Heinz Mu¨ller,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 58,
issue 7
页码: 2573-2576
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.335885
出版商: AIP
数据来源: AIP
摘要:
A computer simulation is employed to demonstrate, in a two‐dimensional growth model, that a vapor‐deposited thin film of low adatom mobility undergoes a sudden change from a porous columnar microstructure to a densely packed film if the substrate temperature is increased to a certain value. The temperature where this structural transition occurs is shown to be related to the lower boundary temperature of the empirical structure‐zone model. The dependence of the transition temperature and range on the vapor deposition rate is discussed.
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