Patterned metal growth from dimethylaluminum hydride
作者:
Nongfan Zhu,
Ted Cacouris,
Rob Scarmozzino,
Richard M. Osgood,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 3
页码: 1167-1176
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585881
出版商: American Vacuum Society
关键词: FILM GROWTH;CHEMICAL VAPOR DEPOSITION;ALUMINIUM;ULTRAVIOLET RADIATION;LASER RADIATION;TEMPERATURE DEPENDENCE;METALLIZATION;ELECTRODES;OPTICAL MODULATORS;VAPOR DEPOSITED COATINGS;Al
数据来源: AIP
摘要:
We report on a two‐step process for the patterning and growth of aluminum films from the metallorganic source gas dimethylaluminum hydride (DMAlH). In particular, ultraviolet light from a cw or pulsed laser source is used to generate a seed layer for selective chemical vapor deposition of aluminum conductors. The dependence of growth selectivity on the temperature and substrate material, the influence of the seed‐layer thickness on film growth, and the process parameters such as temperature and pressure, that yield high purity aluminum, are presented. This technique has been applied to two applications with different materials requirements: final metallization of a complementary metal–oxide‐semiconductor gate array in silicon, and electrode formation for GaAs/AlGaAs integrated optical modulators.
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