首页   按字顺浏览 期刊浏览 卷期浏览 A low‐cost induction power supply for substrate heating
A low‐cost induction power supply for substrate heating

 

作者: L. G. Meiners,   B. T. Hemmelman,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1993)
卷期: Volume 64, issue 5  

页码: 1296-1303

 

ISSN:0034-6748

 

年代: 1993

 

DOI:10.1063/1.1144083

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The design and construction of a 1‐kW induction heating supply is described. The system was optimized for applications in which the power is coupled into a graphite susceptor which is the substrate holder for samples placed in the reaction chamber of a chemical vapor deposition system. The supply draws power from a 120‐V, 20‐A service outlet and delivers a 10‐kHz output which is proportional to the magnitude of a 0–5 Vdc control signal. Presently available powern‐metal‐oxide‐semiconductor field‐effect transistors permit the construction of a compact unit which is small enough to be installed inside of a deposition cabinet.

 

点击下载:  PDF (1047KB)



返 回