A low‐cost induction power supply for substrate heating
作者:
L. G. Meiners,
B. T. Hemmelman,
期刊:
Review of Scientific Instruments
(AIP Available online 1993)
卷期:
Volume 64,
issue 5
页码: 1296-1303
ISSN:0034-6748
年代: 1993
DOI:10.1063/1.1144083
出版商: AIP
数据来源: AIP
摘要:
The design and construction of a 1‐kW induction heating supply is described. The system was optimized for applications in which the power is coupled into a graphite susceptor which is the substrate holder for samples placed in the reaction chamber of a chemical vapor deposition system. The supply draws power from a 120‐V, 20‐A service outlet and delivers a 10‐kHz output which is proportional to the magnitude of a 0–5 Vdc control signal. Presently available powern‐metal‐oxide‐semiconductor field‐effect transistors permit the construction of a compact unit which is small enough to be installed inside of a deposition cabinet.
点击下载:
PDF
(1047KB)
返 回