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Preparation of TbFe films by magnetron sputtering using multiphase target

 

作者: Yoshio Murakami,   Takayuki Shingyoji,   Kenichi Hijikata,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1990）
卷期: Volume 8, issue 1  

页码: 7-12

 

ISSN:0734-2101

 

年代: 1990

 

DOI:10.1116/1.576992

 

出版商: American Vacuum Society

 

关键词: TERBIUM COMPOUNDS;IRON COMPOUNDS;SPUTTERING;THIN FILMS;MAGNETRONS;TARGETS;INTERMETALLIC COMPOUNDS;SAMPLE PREPARATION;(Tb,Fe)

 

数据来源: AIP

 

摘要:

A new type TbFe sputtering target which is composed of multiphases (Tb metal, Fe metal, TbFe2intermetallic compound) is developed. Using this new type target, uniformity of composition of the films over a wider area is achieved in preparation of TbFe films by magnetron sputtering. Composition of the films depend on various preparation conditions and especially dc or rf induced selfbias voltage is an important factor which affects the composition. Films prepared from this target have good magneto‐optical properties for memory media.

 

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