New design considerations for vacuum‐systems in thin film processes
作者:
Anders Johnsson,
Jens Reichow,
期刊:
Vakuum in Forschung und Praxis
(WILEY Available online 1993)
卷期:
Volume 5,
issue 1
页码: 23-25
ISSN:0947-076X
年代: 1993
DOI:10.1002/vipr.19930050106
出版商: WILEY‐VCH Verlag
数据来源: WILEY
摘要:
AbstractWe can see clear indications that the traditional HV‐Thin Film processes today, to a greater extent than earlier, are conducted in UHV reactors. The reduced background‐pressure makes it possible to produce better layers with less impurities and with sharp interfaces. UHV conditions also bring possibilities of in‐situ analysis. We acknowledge that the advantages are mainly those concerning inorganic device issues. There are also numerous other possibilities for growing organic materials, however this field of science is in an initial stage. In order to exchange practical experience in the field of Vacuum System Design, more contact is needed between the Thin Film Research community and the Nuclear Physics and Surface Analysis G
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